Tescan MIRA™ SEM pairs a FEG Schottky source with integrated SEM imaging and live elemental analysis in a single Essence™ software window, simplifying the acquisition of morphological and compositional data.
MIRA™ is a practical analytical tool for quality control, failure analysis, and research workflows, offering fast navigation, flexible vacuum modes, and efficient operation across diverse materials.
- Navigate large samples with Wide Field Optics™ down to 2× magnification
- Switch imaging conditions instantly using In-Flight Beam Tracing™ and the Intermediate Lens™
- Collect compositional data directly in the SEM window with Essence™ EDS
- Work with challenging or non-conductive samples using SingleVac™ or optional MultiVac
- Increase resolving power with optional in-column SE/BSE detectors and Beam Deceleration Technology
- Support safe operation with the Essence™ 3D Collision Model for real-time movement awareness





