Tescan MIRA™ SEM

Product Details

Tescan MIRA SEM pairs a FEG Schottky source with integrated SEM imaging and live elemental analysis in a single Essence™ software window, simplifying the acquisition of morphological and compositional data.

MIRA is a practical analytical tool for quality control, failure analysis, and research workflows, offering fast navigation, flexible vacuum modes, and efficient operation across diverse materials.

  • Navigate large samples with Wide Field Optics™ down to 2× magnification
  • Switch imaging conditions instantly using In-Flight Beam Tracing™ and the Intermediate Lens™
  • Collect compositional data directly in the SEM window with Essence™ EDS
  • Work with challenging or non-conductive samples using SingleVac™ or optional MultiVac
  • Increase resolving power with optional in-column SE/BSE detectors and Beam Deceleration Technology
  • Support safe operation with the Essence™ 3D Collision Model for real-time movement awareness

HOW TESCAN MIRA™ ENHANCES SEM WORKFLOWS

FOR RESEARCH, ANALYSIS, AND Sample INSPECTION

Effortless Imaging and Analysis

Easily switch between imaging and EDS analysis within a single live window using Essence™ EDS. This integration simplifies workflows and cuts down the time spent switching between tools.

Expandable Platform for Advanced Techniques

Add detectors for CL, Raman, STEM, EBSD, and WDS as your research evolves. The modular design grows with your needs.

Wide Field Navigation

Start at 2× magnification with Wide Field Optics™ for easy sample navigation. Move quickly from overview to detail without losing context.

Nanometer-Scale Imaging

The Schottky FEG source and optional in-column SE/BSE detectors provide high-resolution imaging for sub-micron characterization.

Fastest Time to Data

In-Flight Beam Tracing™ and Intermediate Lens™deliver optimal imaging and analytical performance, even for SEM newcomers,helping you achieve results faster.

Innovation for Complex Research

Use the Tescan Nanoprototyping Toolbox to transform advanced concepts into practical results.

Confident Handling of Sensitive Samples

Analyze charging or beam-sensitive materials using SingleVac™ and optional MultiVac, minimizing artefacts and preserving sample integrity.

Tescan Imaging Software

Tescan ESSENCE™

Unified Control for Imaging and Analysis

Tescan Essence™ offers a modular interface for MIRA, allowing users to manage imaging, navigation, and microanalysis within a single customizable layout. This adjustable design promotes efficient, consistent workflows for both routine and advanced SEM tasks.

  • Access spectra, elemental maps, and imaging data within a single integrated Essence™ SW control interface
  • Maintain consistent beam performance with In-Flight Beam Tracing™
  • Navigate confidently using the real-time Essence™ 3D Collision Model to protect detectors and samples

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